LP MOCVD growth of InAlN/GaN HEMT heterostructure: comparison of sapphire, bulk SiC and composite SiCopSiC substrates for HEMT device applications

In this paper we report on low-pressure metalorganic vapour deposition of InAlN/GaN heterostructures grown on different substrates (Sapphire, bulk SiC, composite SiCopSiC) for HEMT applications, and on first device performances obtained with these heterostructures. Optimisation of the crystal growth on each kind of substrate has led to InAlN/GaN HEMT heterostructures grown on bulk SiC and on composite SiCopSiC substrates which are successfully compared, in terms of material quality, to the standard GaAlN/GaN HEMT heterostructures grown on bulk SiC substrates. First devices based on InAlN/GaN heterostructures grown on bulk SiC exhibit very good microwave performances, with output power of 10.3 W/mm at 10 GHz, similar to those obtained with GaAlN/GaN heterostructures, confirming the promising potential of InAlN material. (© 2010 WILEY-VCH Verlag GmbH & Co. KGaA, Weinheim)