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A two degree-of-freedom soi-mems translation stage with closed loop positioning
A two degree-of-freedom soi-mems translation stage with closed loop positioning
2011
Bonjin Koo
Jingyan Dong
Placid Mathew Ferreira
Keywords:
Degrees of freedom (statistics)
Silicon on insulator
Electronic engineering
Microelectromechanical systems
Physics
closed loop
Computer science
Control theory
Correction
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