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A method for producing a sichselbstjustierenden transistor with lightly doped drain and source in a trench.
A method for producing a sichselbstjustierenden transistor with lightly doped drain and source in a trench.
1990
Sang Hoo Dhong
Wei Hwang
Nicky Chau-Chun Lu
Keywords:
Doping
Transistor
Trench
Optoelectronics
Materials science
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