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Surface Morphology of p-Type ( 100 ) Silicon Etched in Aqueous Alkaline Solution
Surface Morphology of p-Type ( 100 ) Silicon Etched in Aqueous Alkaline Solution
2004
Joseph T. Dusek
R.L. Mieville
It B. Poeppel
Mark S. Kleefisch
S Pei
P. Kobylinski
Carl A. Udovich
V. Zhang-McCoy
Uthamalingam Balachandran
W.L. . Worrell
Keywords:
Materials science
Aqueous solution
Silicon
Inorganic chemistry
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