New reference material for transmission electron microscope calibration

We propose a new type of reference material as a magnification standard of transmission electron microscope and a scanning transmission electron microscope. The reference material represents a thin cross-section of a silicon relief structure with certified sizes of its elements. It is fabricated using ion milling. Such reference material can be used for high microscope magnifications (by direct observation of the lattice), as well as for moderate magnifications (around 30,000 times).