Evaluation of a micro motor with integrated MSM material

A system consisting of two stators and two stripes of magnetic Ni-Mn-Ga shape memory (MSM) material tied together by a connector is built. To improve the flux guide capabilities, a 25 /spl mu/m soft magnetic layer (NiFe 81/19) is deposited below the coils. For initial tests, only one coil system is excited. Starting at 50 mA, the current is increased continuously. At 190 mA, a significant change is observed in the length of the MSM material. This test demonstrate the feasibility of building microactuators using MSM material.