Design of microwave near-field microscope analyzer for material chips and Realization of a system

In this paper, the technique and test method of microwave near-field microscopy are studied. The microwave circuit unit is integrated, and the microwave near-field microscope analyzer is designed and implemented. The working frequency is 10MHz ~ 40GHz. Then, the calibration method of instrument and system is put forward. The electrical error and mechanical error are calibrated, and the system parameters are corrected. PMMA was used as sample to test and verify. Based on the analyzer, a microwave microscope system with a resolution of 100 nm is realized.