Structural Effects on Thermal Conductivity of SiGeAu Superlattice Thin Films

We have measured the thermal conductivity of thin films and discussed the relationship between the thermal conductivity and structure of thin films. All samples had a very low thermal conductivity compared with a conventional bulk sample. The thermal conductivity changed depending on the sample structure. The thermal conductivity decreased with the existence of the artificial superlattice structure and the phase transition to the amorphous phase.