Bicycloalkene derivatives and polymers thereof
1998
A bicycloalkene derivative represented by following chemical formula II: wherein R' and R" independently represent hydrogen, or linear or branched C 1 - C 4 alkyl group with or without substituent(s), m represents number of 1 to 8, and n represents number of 1 to 6, are useful for preparing polymers employed in photoresists. Copolymers may be obtained from compounds (II) and/or (V) and maleic anhydride:
Keywords:
- Correction
- Source
- Cite
- Save
- Machine Reading By IdeaReader
0
References
0
Citations
NaN
KQI