A single-chip diaphragm-type miniature Fabry–Perot pressure sensor with improved cross-sensitivity to temperature

We present a new micromachined Fabry–Perot (FP) cavity with a novel single deeply corrugated diaphragm for pressure-sensing applications. An approximate expression was obtained to evaluate the stress-releasing factor of the proposed diaphragm. Various factors such as the variations of film thickness and stress due to temperature increase were considered to evaluate the temperature dependence of the FP pressure sensor. A temperature controlled sensor chamber was developed to measure the optical response of the proposed FP pressure sensor. Both analytical and experimental results have shown that cross-sensitivity to temperature of a Fabry–Perot cavity-based pressure sensor can reasonably be alleviated by the proposed technique.