Investigation of the nanochannel geometry modulation on self-heating in AlGaN/GaN Fin-HEMTs on Si

The impact of the nanochannel geometry on the thermal performance of AlGaN/GaN Fin-HEMTs was investigated. Structures with a larger nanochannel space (Sfin) or a smaller nanochannel width (Wfin) show the suppressed self-heating effect, which was confirmed by the smaller dispersion between DC and pulsed measurements together with the reduced high temperature degradation of the drain current. A closed-form expression based on the heat flow theory was used to illustrate the coupling effect of Wfin and Sfin, and the channel temperature was mapped considering the different nanochannel geometries. As Wfin and Sfin scale down simultaneously, the nanochannel structure would present a much lower channel temperature, demonstrating that the heat generation dominated by Wfin has a greater impact on the self-heating in Fin-HEMTs.The impact of the nanochannel geometry on the thermal performance of AlGaN/GaN Fin-HEMTs was investigated. Structures with a larger nanochannel space (Sfin) or a smaller nanochannel width (Wfin) show the suppressed self-heating effect, which was confirmed by the smaller dispersion between DC and pulsed measurements together with the reduced high temperature degradation of the drain current. A closed-form expression based on the heat flow theory was used to illustrate the coupling effect of Wfin and Sfin, and the channel temperature was mapped considering the different nanochannel geometries. As Wfin and Sfin scale down simultaneously, the nanochannel structure would present a much lower channel temperature, demonstrating that the heat generation dominated by Wfin has a greater impact on the self-heating in Fin-HEMTs.