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Kinetics of silicide layers formation at thermoion deposition of titanium on monocrystal silicon
Kinetics of silicide layers formation at thermoion deposition of titanium on monocrystal silicon
1991
V.P. Belevskij
A.E. Borzakovskij
O.N. Vysotskij
I.V. Gusev
V.I. Chaplyuk
Keywords:
Deposition (chemistry)
Chemical engineering
Charged particle
Titanium
Materials science
Silicon
Ion
Kinetics
Silicide
Semimetal
Correction
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