Optimization of YBa/sub 2/Cu/sub 3/O/sub 7/ thin films for multilayers

The in situ growth of YBa/sub 2/Cu/sub 3/O/sub 7/ thin films has been studied using e-beam coevaporation. The growth conditions for smooth YBa/sub 2/Cu/sub 3/O/sub 7/ films with high T/sub c/ and J/sub c/ have been established. Superconductor-insulator (SI) and superconductor-insulator-superconductor (SIS) structures have been grown using Y/sub 2/O/sub 3/ as an epitaxial insulator, and preliminary vertical transport measurements in patterned structures are reported.