Inspection apparatus and method of the surface of the sample

The present invention provides a surface inspection method and apparatus for inspecting a surface of a sample. In the present invention, it is coated with the sample surface resistance film, a charged particle beam coated sample surface in the resistor film is irradiated, thereby, the inspection of the sample surface is performed. The surface inspection method of the present invention, the resistive film is applied to any thickness t Then, by dissolving a portion of the coated arbitrary thickness of the resistive film, to reduce the thickness of the resistive film to a desired thickness. This makes it precisely controllable resistance value of the resistive film, it is possible to reduce the distortion of the image at the time of detection.