Method for producing group iii nitride crystal, group iii nitride crystal, semiconductor device and apparatus for producing group iii nitride crystal
2014
Provided is a method for producing a group III nitride crystal, which exhibits excellent reactivity and operability, and wherein a by-product containing a halogen does not have an adverse effect on crystal formation.
A method for producing a group III nitride crystal, which is characterized by comprising a group III nitride crystal production step for producing a group III nitride crystal by reacting a group III metal element, an oxidizing gas and a nitrogen-containing gas with each other.
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