MEMS integrated narrow band infrared emitter and detector for infrared gas sensor

With the development of microfabrication technology, compact, lightweight, inexpensive and portable micro-spectrum detection and analyzing products are expected to be extensively applied in the future commercially. From the viewpoint of power consumption and compact volume, integration of various components on one substrate is desirable. In this work, integrated infrared gas sensor with micro infrared emitter and detector elements based on MEMS technology are developed. The integrated suspended infrared emitter and infrared micobolometers are designed and fabricated on a silicon substrate.