Low/Intermediate Temperature Pyrolyzed Polysiloxane Derived Ceramics with Increased Carbon for Electrical Applications

Abstract This study focuses on the chemistry, thermal stability, and electrical conductivity of low/intermediate pyrolysis temperature (700-900 °C) polysiloxane derived ceramics. These ceramics were modified with additional carbon derived from divinylbenzene (DVB) added to the precursor. Their electrical properties were investigated for potential uses in micro-electrical mechanical systems (MEMS) and anodes for lithium batteries. The microstructure and chemical composition was investigated by attenuated total reflectance Fourier transform infrared spectroscopy (ATR-FTIR), Raman spectroscopy, and x-ray photoelectron spectroscopy (XPS); thermogravimetric analysis (TGA) provided insight into the thermal stability; and electrochemical impedance spectroscopy (EIS) into the electrical properties of the material. The increase of pyrolysis temperature and carbon content lead to an enhancement of the electrical conductivity, higher than previously reported values for intermediate pyrolysis temperature SiOC polymer derived ceramics. A limit of the amount of DVB that can be added to PHMS to produce a hybrid precursor has also been obtained.