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Procédé de fabrication de silicium contraint sur un substrat SOI
Procédé de fabrication de silicium contraint sur un substrat SOI
2006
Koji Matsumoto
Masanobu Miyao
Masahiko Nakamae
Masaharu Ninomiya
Keywords:
Silicon on insulator
Materials science
Composite material
Optoelectronics
Fabrication
Correction
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