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Method for producing an alkaline niobate-based piezoelectric thin-film element
Method for producing an alkaline niobate-based piezoelectric thin-film element
2013
suenaga kazufumi
kazufumi suenaga
sibata kenzi
kenzi sibata
watanabe kazutosi
kazutosi watanabe
fumimasa horikiri
masaki noguti
Keywords:
Thin film
Piezoelectricity
Materials science
Composite material
piezoelectric thin films
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