Measurement of In-Plane Displacement in Two Orthogonal Directions by Digital Speckle Pattern Interferometry

The measurement of in-plane displacement in two orthogonal directions is of considerable significance for modern industries. This paper reports on a spatial carrier phase-shift digital speckle pattern interferometry (DSPI) for the simultaneous measurement of in-plane displacement in two orthogonal directions. The object is illuminated from a single direction and observed from four symmetrical directions simultaneously. One pair of the four observation directions is sensitive to in-plane displacement in one direction, and the other pair is sensitive to in-plane displacement in the perpendicular direction, resulting in the displacement in two directions being measured independently. The polarization property of light is used to avoid cross-interference between the two pairs of beams. Spatial carrier frequencies are generated by aperture misalignment, and the displacement in two directions is modulated onto the same interferogram. With a spatial carrier phase-shift technique, the displacement can be separated in the frequency domain and the phase can be evaluated from a single interferogram in real time. The capability of DSPI is described by theoretical discussions and experiments.