Methods and devices for the control of micromirrors

Method for driving a micromirror (24), comprising the steps of: a) providing a micromirror array (22) (in an illumination system 10) of a microlithographic projection exposure apparatus is disposed and contains the micromirror (24), said micromirror (24) about a respective tilt angle (α b) specifying two control variables (SG c) any combination of the two control variables (SG d) determining the control signals (U