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Synergistic Effect of Photocatalysis and Fenton on Improving the Removal Rate of 4H-SiC during CMP
Synergistic Effect of Photocatalysis and Fenton on Improving the Removal Rate of 4H-SiC during CMP
2021
Jiabin Lu
Yuanfu Huang
Youzhi Fu
Qiusheng Yan
Shuai Zeng
Keywords:
Chemical engineering
Materials science
Photocatalysis
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