Micro Spectrometer and MEMS for Space

novel instrument technology for a micro spectrometer is presented. A HADAMARD-transform-spectrometer (HTS), based on an optical grating and an array arrangement, is realized, by an extremely miniaturized set up by implementing MEMS. The spectrometer for the UV -VIS spectral region, with a spectral resolution (FWHM) of t1A = 1.2 nm, has a volume of about 300 cm3• The digital spectral resolution given by the detector pixels is increased by up to a factor of 5 using additional subpixel generation, and the throughput is increasea too. The MEMS are state-of-the-art mechanical slit positioning systems with micro slit chips. The set up is qualified for space, and was realized for measurement of the ozone concentration in the upper stratosphere of the Earth.