Analysis of Light Scattering Properties about Dent Nanoparticles upon Wafer

The light scattering properties of the dent nanoparticles upon wafers is discussed in this paper. Taking the advantage of the Bobbert-Vlieger (BV) theorem, the scattering model between wafer and dent nanoparticles is established. The scattering process is analyzed and the scattering coefficients are derived by using of the vector spherical harmonic function. The differential scattering cross section (DSCS) of the dent nanoparticles upon the wafer is calculated which is compared with the extended Mie method proved the validity of the method and the influences of the dent position, dent scale and scattering angle on the DSCS are analyzed numerically in details. The result is shown that the effect of the dielectric is smaller than the metal. Therefore, the material of the defect and the shape can be extracted by calculate the DSCS, which provide strong theoretical foundation to the nondestructive detector engineer.