Illumination effects on image formation in X-ray proximity printing
1991
Abstract Image intensity profile calculations using the XMAS simulation program are presented for storage ring X-ray lithography proximity printing under several illumination conditions. The calculations indicate considerable widening of the process window for simultaneous replication of several kinds of submicron features by decreasing the image coherence using various techniques.
Keywords:
- Correction
- Source
- Cite
- Save
- Machine Reading By IdeaReader
3
References
7
Citations
NaN
KQI