A Method of Controlling a Rate of an Energy Input into a Target Surface Using a Submillisecond Electron Beam

The paper presents the features of the electron source SOLO with a grid plasma cathode, the operation principle of which is based on the use of a fine-mesh grid that stabilizes the boundary of the emission plasma. The SOLO source allows the generation of wide (up to several cm 2 ) low-energy (up to 25 keV) intense (hundreds of amperes) submillisecond electron beams and use these beams in vacuum to modify the surface of various inorganic materials (an energy density up to 100 J/cm 2 ). It was shown that the presence of the grid stabilization allows to provide an important distinguishing feature of such an electron source, namely, the ability to generate the electron beam with variable power by changing its amplitude during a pulse of submillisecond duration. This unique feature of electron sources with plasma cathodes allows not only to control the surface temperature of the irradiated sample, but in some cases provides conditions for a more stable operation of the electron source, which allows a greater specific energy to be introduced into the sample surface.