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Integration of functional polymers in organic MEMS for sensing applications
Integration of functional polymers in organic MEMS for sensing applications
2013
Damien Thuau
Georges Dubourg
Karsten Haupt
Claude Pellet
Philippe Poulin
Isabelle Dufour
Cédric Ayela
Keywords:
Nanotechnology
Microelectromechanical systems
Functional polymers
Materials science
sensing applications
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