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Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS)
Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS)
2012
Takashi Kasahara
Jun Mizuno
Shitau Hirata
Tomohiko Edura
Shigeyuki Matsunami
Chihaya Adachi
Shuichi Shoji
Keywords:
Nanotechnology
Microelectromechanical systems
Materials science
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