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Nb 9-Layer Fabrication Process for Superconducting Large-Scale SFQ Circuits and Its Process Evaluation
Nb 9-Layer Fabrication Process for Superconducting Large-Scale SFQ Circuits and Its Process Evaluation
2014
Shuichi Nagasawa
Kenji Hinode
T. Satoh
Mutsuo Hidaka
Hiroyuki Akaike
Akira Fujimaki
Nobuyuki Yoshikawa
Kazuyoshi Takagi
Naofumi Takagi
Keywords:
Shift register
Electronic circuit
Superconductivity
Electronic engineering
Engineering
Chemical-mechanical planarization
Electrical engineering
Superconducting tunnel junction
Fabrication
process evaluation
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