A Kirigami MEMS Velocity Acoustic Transducer

A miniaturized ribbon microphone, a kirigami microphone, is fabricated and characterized. The microphone with a low-spring constant shows a flat frequency response up to 60 kHz. The low-spring constant is due to corrugation on the ribbon. Owing to the ultra-low mass of the ribbon (200 nm thick PECVD silicon nitride film), the transient response to sound pressure is $120\ \mu\mathrm{s}$ faster than a commercial dynamic microphone. The kirigami microphone also shows more details of sound pressure at low amplitudes.