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Effects of CF$_4$ Plasma Treatment on Electrostatic Discharge Performance of AlGaN/GaN Schottky Barrier Diodes
Effects of CF$_4$ Plasma Treatment on Electrostatic Discharge Performance of AlGaN/GaN Schottky Barrier Diodes
2017
Ye-Ji Lee
Jihyun Yu
Taehoon Jang
Kyu-Hwan Shim
Deok Ho Cho
Keywords:
Schottky barrier
Atomic physics
Plasma
Electrostatic discharge
Diode
Materials science
algan gan
Optoelectronics
plasma treatment
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