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Graphical Approach to Sensitive Detection of Interface Defects in Thin Oxide MOS Capacitors
Graphical Approach to Sensitive Detection of Interface Defects in Thin Oxide MOS Capacitors
2002
Koji Kita
Y. Osaka
Kentaro Kyuno
Shinichi Takagi
K. Takasaki
M. Kubota
Y. Shimamoto
Akira Toriumi
Keywords:
Oxide
Capacitor
Materials science
Electronic engineering
Optoelectronics
thin oxide
Correction
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