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A Study of Impedance Relationships in Dual Frequency PECVD Process Plasma
A Study of Impedance Relationships in Dual Frequency PECVD Process Plasma
2016
Douglas Keil
Edward Augustyniak
Yukinori Sakiyama
Keywords:
Plasma
Electrical impedance
Analytical chemistry
Plasma-enhanced chemical vapor deposition
Materials science
Optoelectronics
dual frequency
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