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Impurity Incorporation Processes in Si-doped GaAsN Thin Films Grown by Atomic Layer Epitaxy
Impurity Incorporation Processes in Si-doped GaAsN Thin Films Grown by Atomic Layer Epitaxy
2014
Yuki Yokoyama
Keywords:
Thin film
Atomic layer epitaxy
Doping
Impurity
Materials science
Inorganic chemistry
si doped
Optoelectronics
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