Highly reliable mobile liquid crystal display using AlOx deposited by atomic layer deposition for side sealing structure

A side sealing structure including, outside a sealant, AlOx deposited using an atomic layer deposition apparatus was employed for a low-frequency driving liquid crystal display (LCD) with a bezel width of 0.7 mm. This side-sealing structure can effectively prevent the entry of external moisture. Prevention of decrease in voltage-holding ratio was confirmed with a test cell having this structure. A narrow-bezel LCD with c-axis-aligned a-b-plane-anchored crystal In-Ga-Zn Oxide backplane can have long-term high reliability as a low-frequency driving LCD.