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Finite Element Analysis of Nano/Micro Pattern Fabrication by Nanoscratch Process
Finite Element Analysis of Nano/Micro Pattern Fabrication by Nanoscratch Process
2005
Chung-Gil Kang
S.W. Youn
J.W. Lee
Keywords:
Amorphous silicon
Metallurgy
Composite material
Nano-
Finite element method
Materials science
Residual stress
Fabrication
micro pattern
Correction
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