Preparation method for nitrogen oxygen titanium aluminum/titanium aluminum nitrogen and titanium aluminum composite film

The invention discloses a preparation method for a nitrogen oxygen titanium aluminum/titanium aluminum nitrogen and titanium aluminum composite film. The preparation method sequentially comprises the following steps: 1, Determining a precipitation technology and target components; 2, selecting and pretreating a substrate workpiece; 3, determining the suspension position of the substrate workpiece; 4, performing vacuum heating treatment; 5, determining a pre-bombardment process; 6, determining a precipitation process. According to the preparation method, the adhesive force between the film and a substrate can be improved, the hardness of the film can be improved, and excellent stability and repeatability can be achieved.