Performance Analysis of Vibration Sensors for Closed-Loop Feedback Health Monitoring of Mechanical Equipment

In this paper, we analyze the performance of mechanical equipment through a closed-loop feedback health monitoring vibration sensor, develop an OTDR optical signal reception and the processing module, and realize the reception, amplification, and filtering of the backscattered optical signal. In terms of vibration signal demodulation, the FPGA signal processing module was developed and debugged to realize the intermodulation with OTDR optical signal reception processing module and the preprocessing of the vibration data stream by taking advantage of the FPGA in parallel high-speed data stream processing. The objective function is constructed based on the dynamic data of the first four vertical frequencies of the modal recognition and the static data of the constant-load cable force of the inclined cable, and the third-order response surface method is applied to fit the response surface function of each correction target. The errors between the corrected FEM calculated values and the measured results are within 5%. The results were compared with the results of static and dynamic corrections, and the results showed that the joint static and dynamic corrections using the third-order response surface could obtain a finite element model that was more comprehensive and closer to the actual engineering response. A 180° feedback gain is set in the mass detection system to reduce the system’s equivalent mass and increase the system resonant frequency. An inverse lock-in amplifier is used instead of a high-frequency bandpass filter to spectrally migrate the useful frequencies and better filter out noise interference. A thin-film microresonant pressure sensor, a cantilever beam microresonant gas sensor, and a microresonant biosensor were designed and developed using the micromachining process. A closed-loop feedback method was used to design a low-frequency detection system, a medium-frequency detection system, and a high-frequency feedback detection based on a phase-locked loop system, completed open-loop and closed-loop detection experiments of the intrinsic frequency of the sensor, through-pressure experiments of the pressure sensor, low and medium frequency gas-sensitive experiments of the gas sensor, and high-frequency detection experiments of the biosensor oxygen absorption/deoxygenation, and measured the mass of individual oxygen molecules.