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Observation of Crystalline Oxidized Silicon Phase
Observation of Crystalline Oxidized Silicon Phase
2019
M. Kuzmin
Juha-Pekka Lehtiö
Jaakko Mäkelä
Muhammad Yasir
Zahra Sadat Jahanshah Rad
Esa Vuorinen
Antti Lahti
M. P. J. Punkkinen
P. Laukkanen
K. Kokko
Hannu Pekka Hedman
Risto Punkkinen
Mika Lastusaari
Päivikki Repo
Hele Savin
Keywords:
Chemical engineering
Capacitor
Atomic layer deposition
Silicon
Materials science
Crystal
Correction
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