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High Temperature SiC Reactor Cleaning Using Chlorine Trifluoride Gas Achieved by Purified Pyrolytic Carbon Coating Film
High Temperature SiC Reactor Cleaning Using Chlorine Trifluoride Gas Achieved by Purified Pyrolytic Carbon Coating Film
2019
Keisuke Kurashima
Kohei Shioda
Hitoshi Habuka
Hideki Ito
Shinichi Mitani
Yoshinao Takahashi
Keywords:
Metallurgy
Materials science
Coating
Chlorine trifluoride
Pyrolytic carbon
Correction
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