Micro-patterns fabrication using focused proton beam lithography

Abstract Proton beam writing technique was recently introduced at 3MV Tandetron accelerator at Nuclear Physics Institute in Rez (Czech Republic). It has been used, to produce three-dimensional (3D) micro-structures in poly(methylmethacrylate) by 2.0 MeV and 2.6 MeV protons micro-beam. Micro-channels (52 μm × 52 μm) have been realized. After chemical etching, the quality of the bottom and side walls of the produced structures in PMMA were analyzed using Scanning Transmission Ion Microscopy (STIM).