Fabrication of polymer micro-tip by optical lensing technique

Fabrication of polymer micro-tips using SU-8 negative photoresist for bio-applications is reported. The SU-8 processing technology and isotropic glass etching process have been developed and utilized to fabricate micro-tips on glass substrate by applying optical lensing effect during photolithography. Experimentally, micro-tips of 25 μm base diameter, ~1 μm tip diameter, and ~250 μm height, have been demonstrated.