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First Demonstration of 300mm InGaAs-On-Insulator Substrates Fabricated using the Smart CutTM Technology
First Demonstration of 300mm InGaAs-On-Insulator Substrates Fabricated using the Smart CutTM Technology
2015
Julie Widiez
S. Sollier
Thierry Baron
M. Martin
Gweltaz Gaudin
F. Mazen
F. Madeira
Sylvie Favier
A. Salaun
S Arnaud
S. David
Elodie Beche
H. Grampeix
Christelle Veytizou
Daniel Delprat
Thomas Signamarcheix
Keywords:
Electronic engineering
Insulator (electricity)
Materials science
Optoelectronics
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