MOEMs devices designed and tested for future astronomical instrumentation in space

Next generation of astronomical instrumentation for space telescopes requires Micro-Opto-Electro- Mechanical Systems (MOEMS) with remote control capability and cryogenic operation. MOEMS devices have the capability to tailor the incoming light in terms of intensity and object selection with programmable slit masks, in terms of phase and wavefront control with micro-deformable mirrors, and finally in terms of spectrum with programmable diffraction gratings. Applications are multi-object spectroscopy (MOS), wavefront correction and programmable spectrographs. We are engaged since several years in the design, realization and characterization of MOEMS devices suited for astronomical instrumentation.