Acceleration test of APF-IH type implanter

Abstract We have designed and manufactured a new compact IH-linac with alternating-phase-focus (APF) system which focuses beams by combination of alternating focus–defocus sections. The APF structure is suitable for shortening the cell length, and the diameter of the acceleration cavity can be reduced by high frequency operation. This linac can accelerate particles up to 85 from 10 keV/u for a charge to mass ratio 1/16, with an operating frequency of 65 MHz. We have constructed an acceleration system for He + and tested it using the APF-IH ion implanter. Two problems occurred. Firstly, multi-pactoring electric discharges occurred. Secondly, the orbital calculation program was in error, so we performed more orbital calculations and manufactured a new vacuum exhaust system.