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Large area line beam formation in Nissin ion doping system for TFT LCD fabrication
Large area line beam formation in Nissin ion doping system for TFT LCD fabrication
2000
Y. Andoh
Yoshio Inouchi
Masakazu Konishi
Junichi Tatemichi
Hiroyuki Tanaka
Nobuyoshi Miyamoto
Yoshitatsu Matsuda
Sawako Maeno
Mariko Fujimoto Naito
Keywords:
Ion beam
Magnet
Biology
Beam (structure)
Thin-film transistor
Doping
Analytical chemistry
Ion
Liquid-crystal display
Correction
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