Micromirror Arrays for Adaptive Optics
2000
The long-range goal of this project is to develop the optical and mechanical design of a micromirror array for adaptive optics that will meet the following criteria: flat mirror surface ({lambda}/20), high fill factor (> 95%), large stroke (5-10 {micro}m), and pixel size {approx}-200 {micro}m. This will be accomplished by optimizing the mirror surface and actuators independently and then combining them using bonding technologies that are currently being developed.
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