A novel multi-functional self-powered pressure sensor with hierarchical wrinkle structure

This paper reports a novel multi-functional self-powered pressure sensor with hierarchical wrinkle structure which is able to detect pressure as well as harvest the mechanical energy. Due to the utilization of hierarchical wrinkle structure, the device shows high sensitivity of 2.0 kPa-1 with the excellent response performance of 0.15 ms (rise-time) and 0.7 ms (release-time), respectively. In addition, the high-density surface charges on the fluoride PDMS wrinkle structure deriving from the contact of PDMS layer and ITO layer enable the device to act as an energy harvester. This self-powered pressure sensor can figure out different stimuli (bending & pressure), the device generates 300V and 3µA under bending while generating 75V and 17µA under pressure. Therefore, the device can be utilized to identify differentiate mechanical stimuli without external batteries.