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CaF2 polycrystal, focus ring, a manufacturing method of a plasma processing apparatus and CaF2 polycrystals
CaF2 polycrystal, focus ring, a manufacturing method of a plasma processing apparatus and CaF2 polycrystals
2012
fuziwara kanetuki
kanetuki fuziwara
tyoku ho uehara
yuka narikawa
Keywords:
Plasma processing
Analytical chemistry
Materials science
Optoelectronics
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