Characterization of structural effects in ferroelectric tunable capacitors using barium strontium titanate thin films

We fabricated two types of ferroelectric tunable capacitors, which were metal-insulator-metal structure (MIM) and interdigital electrodes structure (IDE) using (Ba 0.7 Sr 0.3 )TiO 3 (BST) thin films prepared by chemical solution decomposition (CSD) method. These films showed grained structure and crystalline properties were randomly oriented. Dielectric tunabilty of MIM structures was -52%/6V and that of IDE structures was -50%/15 V, at 2GHz respectively. Quality factor of IDE structures was higher than that of MIM structures.